TSMC reiterates it doesn't need High-NA EUV for 1.4nm-class process technology

TSMC reaffirmed that it will not use High-NA EUV lithography for its upcoming A16 and A14 process technologies, as Low-NA EUV tools combined with internal innovations provide sufficient scaling and performance benefits.

https://www.tomshardware.com/tech-industry/semiconductors/tsmc-reiterates-it-doesnt-need-high-na-euv-for-1-4nm-class-process-technology

Created 7d | May 28, 2025, 10:20:04 PM


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